Epitaxial Lateral Overgrowth of GaN on Si (111) Substrates...

Chemical Vapor Deposition 2010 Vol. 16; Iss. 1-3

Epitaxial Lateral Overgrowth of GaN on Si (111) Substrates Using High-Dose, N+ Ion Implantation

Bumjoon Kim, Kwangtaek Lee, Samseok Jang, Junggeun Jhin, Seungjae Lee, Jonghyeob Baek, Youngmoon Yu, Jaesang Lee, Dongjin Byun
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Volume:
16
Year:
2010
Language:
english
Pages:
5
DOI:
10.1002/cvde.200906807
File:
PDF, 506 KB
english, 2010
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