Tunable Conformality of Polymer Coatings on High Aspect...

Chemical Vapor Deposition 2010 Vol. 16; Iss. 1-3

Tunable Conformality of Polymer Coatings on High Aspect Ratio Features

Gozde Ozaydin-Ince, Karen K. Gleason
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
16
Year:
2010
Language:
english
Pages:
6
DOI:
10.1002/cvde.200906821
File:
PDF, 386 KB
english, 2010
Conversion to is in progress
Conversion to is failed