Role of Hydrogen in the CVD of Wide Bandgap Nitride...

Chemical Vapor Deposition 2010 Vol. 16; Iss. 10-12

Role of Hydrogen in the CVD of Wide Bandgap Nitride Semiconductors

Stephen J. Pearton, Alexander Y. Polyakov
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Volume:
16
Year:
2010
Language:
english
Pages:
9
DOI:
10.1002/cvde.201000041
File:
PDF, 386 KB
english, 2010
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