Ultrathin Diblock Copolymer/Titanium Laminates—A Tool for Nanolithography
Joachim P. Spatz, Peter Eibeck, Stefan Mößmer, Martin Möller, Thomas Herzog, Paul ZiemannVolume:
10
Year:
1998
Language:
english
Pages:
4
DOI:
10.1002/(sici)1521-4095(199808)10:113.0.co;2-5
File:
PDF, 280 KB
english, 1998