Thickness-scaling of sputtered PZT films in the 200 nm...

Journal of Electronic Materials 1994 / 12 Vol. 23; Iss. 12

Thickness-scaling of sputtered PZT films in the 200 nm range for memory applications

C. Sudhama, J. Kim, R. Khamankar, V. Chikarmane, J. C. Lee
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Volume:
23
Language:
english
Pages:
8
DOI:
10.1007/bf02649888
Date:
December, 1994
File:
PDF, 1.22 MB
english, 1994
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