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Effects of oxygen on crystallization of amorphous silicon films and polysilicon TFT characteristics
Yong-Min Ha, Seong-Hoon Lee, Chul-Hi Han, Choong-Ki KimVolume:
23
Language:
english
Pages:
7
DOI:
10.1007/bf02651265
Date:
January, 1994
File:
PDF, 1.67 MB
english, 1994