An accurate and computationally efficient semi-empirical model for arsenic implants into single-crystal (100) silicon
Shyh-Horng Yang, Steven J. Morris, David L. Lim, Al F. Tasch, Robert B. Simonton, Dennis Kamenitsa, Charles Magee, Gayle LuxVolume:
23
Language:
english
Pages:
8
DOI:
10.1007/bf02651376
Date:
August, 1994
File:
PDF, 859 KB
english, 1994