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Carbon reactions in reactive ion etched silicon
J. L. Benton, J. Michel, L. C. Kimerling, B. E. Weir, R. A. GottschoVolume:
20
Language:
english
Pages:
5
DOI:
10.1007/bf02654532
Date:
September, 1991
File:
PDF, 516 KB
english, 1991