Optical interferometry for surface measurements of CMP pads

Journal of Electronic Materials 1996 / 10 Vol. 25; Iss. 10

Optical interferometry for surface measurements of CMP pads

David Stein, Dale Hetherington, Mike Dugger, Tom Stout
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Volume:
25
Language:
english
Pages:
5
DOI:
10.1007/bf02655586
Date:
October, 1996
File:
PDF, 1.28 MB
english, 1996
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