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Annealing of lead zirconate titanate (65/35) thin films for ultra large scale integration storage dielectric applications: Phase transformation and electrical characteristics
Vinay Chikarmane, Jiyoung Kim, Chandra Sudhama, Jack Lee, Al Tasch, Steve NovakVolume:
21
Language:
english
Pages:
10
DOI:
10.1007/bf02655617
Date:
May, 1992
File:
PDF, 2.34 MB
english, 1992