In-situ plasma cleaning of stainless steel III-V MOCVD...

Journal of Electronic Materials 1992 / 02 Vol. 21; Iss. 2

In-situ plasma cleaning of stainless steel III-V MOCVD growth systems

S. Li, G. S. Tompa, K. Moy, S. B. West, C. R. Nelson, R. A. Stall, R. Burnham, S. Smith
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Volume:
21
Language:
english
Pages:
8
DOI:
10.1007/bf02655830
Date:
February, 1992
File:
PDF, 869 KB
english, 1992
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