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The effects of N+ dose in implantation into 6h-sic epilayers
Tsunenobu Kimoto, Akira Itoh, Hiroyuki Matsunami, Toshitake Nakata, Masanori WatanabeVolume:
24
Language:
english
Pages:
6
DOI:
10.1007/bf02659681
Date:
April, 1995
File:
PDF, 517 KB
english, 1995