Process characterization and evaluation of hydride VPE grown GaxIn1−xAs using a Ga/In alloy source
Chinho Park, Vladimir S. Ban, Gregory H. Olsen, Timothy J. Anderson, Kenneth P. QuinlanVolume:
21
Language:
english
Pages:
8
DOI:
10.1007/bf02660410
Date:
April, 1992
File:
PDF, 854 KB
english, 1992