Structural characterization of low temperature Epi-silicon...

Journal of Electronic Materials 1993 / 02 Vol. 22; Iss. 2

Structural characterization of low temperature Epi-silicon grown on {100} and {111} Si substrates using ultrahigh resolution cross-sectional TEM

Zhizhen Ye, Yaping Liu, Zhen-Hong Zhou, Rafael Reif
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
22
Language:
english
Pages:
7
DOI:
10.1007/bf02665034
Date:
February, 1993
File:
PDF, 913 KB
english, 1993
Conversion to is in progress
Conversion to is failed