Characterization of germanium implanted Si1−xGexlayer

Journal of Electronic Materials 1993 / 01 Vol. 22; Iss. 1

Characterization of germanium implanted Si1−xGexlayer

Ashawant Gupta, Carmen Cook, Len Toyoshiba, Jianmin Qiao, Cary Y. Yang, Ken-Ichi Shoji, Akira Fukami, Takahiro Nagano, Takashi Tokuyama
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Volume:
22
Language:
english
Pages:
4
DOI:
10.1007/bf02665734
Date:
January, 1993
File:
PDF, 391 KB
english, 1993
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