Analysis of rapid thermal annealings of boron and arsenic in polysilicon emitter structures
C. Gontrand, A. Merabet, S. Krieger-Kaddour, C. Dubois, J. P. VallardVolume:
22
Language:
english
Pages:
7
DOI:
10.1007/bf02665736
Date:
January, 1993
File:
PDF, 1.37 MB
english, 1993