A digital signal-processing analysis technique for the infrared reflectivity characterization of ion implanted silicon
Gustavo E. Aizenberg, Pieter L. Swart, Beatrys M. LacquetVolume:
21
Language:
english
Pages:
8
DOI:
10.1007/bf02665880
Date:
November, 1992
File:
PDF, 650 KB
english, 1992