Radiation damage and annealing behaviour in Be+-implanted...

Journal of Electronic Materials 1991 / 08 Vol. 20; Iss. 8

Radiation damage and annealing behaviour in Be+-implanted pure Ga(Al)Sb layers

M. PéRotin, A. Sabir, L. Gouskov, H. Luquet, A. Pérez, B. Canut, B. Lambert
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Volume:
20
Language:
english
Pages:
6
DOI:
10.1007/bf02666011
Date:
August, 1991
File:
PDF, 825 KB
english, 1991
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