Thin film silicon on insulator substrates and their application to integrated circuits
S. R. Wilson, T. Wetteroth, S. Hong, H. Shin, B. Y. Hwang, J. Foerstner, M. Racanelli, M. Huang, H. C. ShinVolume:
25
Year:
1996
Language:
english
Pages:
9
DOI:
10.1007/bf02666168
File:
PDF, 1.27 MB
english, 1996