Aluminum and boron ion implantations into 6H-SiC epilayers

Journal of Electronic Materials 1996 / 05 Vol. 25; Iss. 5

Aluminum and boron ion implantations into 6H-SiC epilayers

Tsunenobu Kimoto, Akira Itoh, Hiroyuki Matsunami, Toshitake Nakata, Masanori Watanabe
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Volume:
25
Language:
english
Pages:
6
DOI:
10.1007/bf02666653
Date:
May, 1996
File:
PDF, 500 KB
english, 1996
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