A study of etch pit density and x-ray rocking curves for...

Journal of Electronic Materials 1991 / 05 Vol. 20; Iss. 5

A study of etch pit density and x-ray rocking curves for GaAs substrate evaluation

J. M. Tartaglia, S. M. Crochiere, C. E. Kalnas, D. L. Farrington, J. A. Kronwasser, P. J. Pearah
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Volume:
20
Language:
english
Pages:
8
DOI:
10.1007/bf02670882
Date:
May, 1991
File:
PDF, 834 KB
english, 1991
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