The oxidation of titanium silicide

Journal of Electronic Materials 1990 / 11 Vol. 19; Iss. 11

The oxidation of titanium silicide

Thom Sandwick, Krishna Rajan
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Volume:
19
Language:
english
Pages:
7
DOI:
10.1007/bf02673332
Date:
November, 1990
File:
PDF, 1.55 MB
english, 1990
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