Defect structures in silicon merged epitaxial lateral...

Journal of Electronic Materials 1995 / 11 Vol. 24; Iss. 11

Defect structures in silicon merged epitaxial lateral overgrowth

Srikanth B. Samavedam, Eric P. Kvam, Abul E. Kabir, Gerold W. Neudeck
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Volume:
24
Language:
english
Pages:
5
DOI:
10.1007/bf02676844
Date:
November, 1995
File:
PDF, 1.03 MB
english, 1995
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