Stress in thermally annealed parylene films
S. Dabral, J. Van Etten, X. Zhang, C. Apblett, G. -R. Yang, P. Ficalora, J. F. McDonaldVolume:
21
Language:
english
Pages:
6
DOI:
10.1007/bf02684208
Date:
October, 1992
File:
PDF, 557 KB
english, 1992