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Electrical Properties of Polysilicon Electrodes for Conductometric Measurement
Jian Wu, Jan Suls, Willy SansenVolume:
12
Year:
2000
Language:
english
Pages:
4
DOI:
10.1002/(sici)1521-4109(200005)12:73.0.co;2-m
File:
PDF, 166 KB
english, 2000