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Conceptual design of a synchrotron radiation source dedicated to X-ray lithography
M. Bassetti, E. Bernieri, E. Burattini, A. Cattoni, V. Chimenti, C. Sanelli, S. Tazzari, F. Tazzioli, C. Mencuccini, L. Palumbo, L. Picardi, R. Rinzivillo, Kang ShixiuVolume:
104
Language:
english
Pages:
9
DOI:
10.1007/bf02812487
Date:
December, 1991
File:
PDF, 850 KB
english, 1991