Comparison of doping profiles in capless annealed and dielectrically capped — Annealed ion implanted GaAs
D. P. Siu, A. A. ImmorlicaVolume:
9
Language:
english
Pages:
12
DOI:
10.1007/bf02822722
Date:
September, 1980
File:
PDF, 393 KB
english, 1980