Micromachining of inorganic materials using plasma soft x-rays
Tetsuya Makimura, Satoshi Uchida, Takashige Fujimori, Hiroyuki Niino, Kouichi MurakamiVolume:
91
Year:
2008
Language:
english
Pages:
7
DOI:
10.1002/ecj.10080
File:
PDF, 535 KB
english, 2008