Photo-curable resins and evaluation methods for...

Photo-curable resins and evaluation methods for UV-nanoimprint lithography

Tamao Hirasawa, Jun Taniguchi, Makoto Ohtaguchi, Nobuji Sakai
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Volume:
92
Year:
2009
Language:
english
Pages:
6
DOI:
10.1002/ecj.10136
File:
PDF, 807 KB
english, 2009
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