Photo-curable resins and evaluation methods for UV-nanoimprint lithography
Tamao Hirasawa, Jun Taniguchi, Makoto Ohtaguchi, Nobuji SakaiVolume:
92
Year:
2009
Language:
english
Pages:
6
DOI:
10.1002/ecj.10136
File:
PDF, 807 KB
english, 2009