A study on selective etching for elevated PtSi salicide...

A study on selective etching for elevated PtSi salicide process and work function modulation of PtSi alloying with Hf

Shun-Ichiro Ohmi, Jun Gao
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Volume:
93
Year:
2010
Language:
english
Pages:
6
DOI:
10.1002/ecj.10215
File:
PDF, 1.65 MB
english, 2010
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