A study on selective etching for elevated PtSi salicide process and work function modulation of PtSi alloying with Hf
Shun-Ichiro Ohmi, Jun GaoVolume:
93
Year:
2010
Language:
english
Pages:
6
DOI:
10.1002/ecj.10215
File:
PDF, 1.65 MB
english, 2010