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Electromagnetically driven two-axis optical beam steering MEMS mirror and its dependence of actuation on magnetic field
Yoshiyuki Watanabe, Yutaka Abe, Shinnosuke Iwamatsu, Seiya Kobayashi, Yoshiyuki Takahashi, Toshiyuki SatoVolume:
94
Year:
2011
Language:
english
Pages:
8
DOI:
10.1002/ecj.10377
File:
PDF, 1.93 MB
english, 2011