![](/img/cover-not-exists.png)
A photoacoustic study of thermal conductivity annealing curves for a silicon substrate implanted with Si ions
Nobuya Takabatake, Takeshi Kobayashi, Yoshiyuki Show, Tomio IzumiVolume:
86
Year:
2003
Language:
english
Pages:
8
DOI:
10.1002/ecjb.10034
File:
PDF, 997 KB
english, 2003