The influence of background carbon concentration on the...

Electronics and Communications in Japan (Part II: Electronics)) 2002 Vol. 85; Iss. 2

The influence of background carbon concentration on the transient enhanced diffusion of boron

Tomoya Saito, Jianxin Xia, Ryangsu Kim, Takenori Aoki, Yoshikazu Furuta, Yoshinari Kamakura, Hiroyuki Kobayashi, Kenji Taniguchi
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Volume:
85
Year:
2002
Language:
english
Pages:
7
DOI:
10.1002/ecjb.1093
File:
PDF, 232 KB
english, 2002
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