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Infrared reflection spectroscopic investigation of adsorption of SiHx(CH3)4−x on Si surfaces
Masanori Shinohara, Daisei Shoji, Takehiro Maehama, Yosuke Akama, Michio NiwanoVolume:
85
Year:
2002
Language:
english
Pages:
7
DOI:
10.1002/ecjb.1108
File:
PDF, 350 KB
english, 2002