Surface evaluation of LiNbO3 and LiTaO3 crystals etched...

Surface evaluation of LiNbO3 and LiTaO3 crystals etched using fluorine system gas plasma reactive ion etching

Takahiro Fujii, Shinzo Yoshikado
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Volume:
149
Year:
2004
Language:
english
Pages:
7
DOI:
10.1002/eej.10365
File:
PDF, 2.70 MB
english, 2004
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