Surface evaluation of LiNbO3 and LiTaO3 crystals etched using fluorine system gas plasma reactive ion etching
Takahiro Fujii, Shinzo YoshikadoVolume:
149
Year:
2004
Language:
english
Pages:
7
DOI:
10.1002/eej.10365
File:
PDF, 2.70 MB
english, 2004