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Proposal of next-generation three-dimensional X-ray lithography and its application to fabrication of a high-luminescence optical waveguide for a liquid crystal backlight unit
Yuichi Utsumi, Takefumi Kishimoto, Tadashi Hattori, Megumi MinamitaniVolume:
165
Year:
2008
Language:
english
Pages:
8
DOI:
10.1002/eej.20680
File:
PDF, 1.89 MB
english, 2008