New design and development of size-selected gas cluster...

New design and development of size-selected gas cluster SIMS

Kousuke Moritani, Michihiro Hashinokuchi, Gen Mukai, Kozo Mochiji
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Volume:
176
Year:
2011
Language:
english
Pages:
7
DOI:
10.1002/eej.21159
File:
PDF, 923 KB
english, 2011
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