Measurement techniques for the determination of doping and...

Measurement techniques for the determination of doping and mobility profiles in GaAs epitaxial layers

B. Szentpáli, B. Kovács, F. Riesz, V. V. Tuyen
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Volume:
74
Language:
english
Pages:
10
DOI:
10.1007/bf03055234
Date:
March, 1994
File:
PDF, 388 KB
english, 1994
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