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Optical emission spectroscopy in reactive hollow cathode arc discharge plasmas – Local distribution of active species during the deposition of hard carbon films
V. Hemel, H. Bolt, F. Koch, H. NickelVolume:
355
Language:
english
Pages:
3
DOI:
10.1007/s0021663550244
Date:
June, 1996
File:
PDF, 158 KB
english, 1996