Characteristic temperatures and electron number densities...

Analytical and Bioanalytical Chemistry 1996 / 06 Vol. 355; Iss. 3-4

Characteristic temperatures and electron number densities in an R.F. capacitively coupled plasma

Sorin D. Anghel, Tiberiu Frentiu, Eugen Darvasi, Ana-Maria Rusu, Alpar Simon, E. A. Cordos
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Volume:
355
Language:
english
Pages:
2
DOI:
10.1007/s0021663550250
Date:
June, 1996
File:
PDF, 143 KB
english, 1996
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