Analytical performance of an r.f. capacitively coupled...

Analytical performance of an r.f. capacitively coupled plasma for atomic emission with tip-ring electrode geometry

Tiberiu Frenţiu, Ana-Maria Rusu, Michaela Ponta, Sorin D. Anghel, E. A. Cordos
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Volume:
355
Language:
english
Pages:
2
DOI:
10.1007/s0021663550254
Date:
June, 1996
File:
PDF, 110 KB
english, 1996
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