EUV damage threshold measurements of Mo/Si multilayer...

Applied Physics A: Materials Science & Processing 2012 / 08 Vol. 108; Iss. 2

EUV damage threshold measurements of Mo/Si multilayer mirrors

Müller, Matthias, Barkusky, Frank, Feigl, Torsten, Mann, Klaus
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Volume:
108
Language:
english
Pages:
5
Journal:
Applied Physics A
DOI:
10.1007/s00339-012-7037-9
Date:
August, 2012
File:
PDF, 1.46 MB
english, 2012
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