Crystallization of ion-beam-synthesized SiC layer by...

Crystallization of ion-beam-synthesized SiC layer by thermal annealing

Wu, W., Chen, D.H., Cheung, W.Y., Xu, J.B., Wong, S.P., Kwok, R.W.M., Wilson, I.H.
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Volume:
66
Language:
english
Pages:
1
DOI:
10.1007/s003390051198
Date:
March, 1998
File:
PDF, 361 KB
english, 1998
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