Sputtered thin film piezoelectric aluminum nitride as a functional MEMS material
S. Marauska, V. Hrkac, T. Dankwort, R. Jahns, H. J. Quenzer, R. Knöchel, L. Kienle, B. WagnerVolume:
18
Language:
english
Pages:
9
DOI:
10.1007/s00542-012-1493-1
Date:
June, 2012
File:
PDF, 837 KB
english, 2012