Quantitative Analysis of Ti-Si-Ge/Si-Ge/Si Structures by...

Microchimica Acta 2000 / 04 Vol. 132; Iss. 2-4

Quantitative Analysis of Ti-Si-Ge/Si-Ge/Si Structures by EDS and AES

Berner, Alexander I., Beregovsky, Michael Y., Eizenberg, Moshe M.
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Volume:
132
Language:
english
Pages:
5
DOI:
10.1007/s006040050095
Date:
April, 2000
File:
PDF, 99 KB
english, 2000
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