Polycrystalline silicon films fabricated by rapid thermal...

Journal of Materials Science: Materials in Electronics 2012 / 07 Vol. 23; Iss. 7

Polycrystalline silicon films fabricated by rapid thermal annealing

Lei Zhang, Honglie Shen, Jiayi You, Feng Jiang, Tianru Wu, Zhengxia Tang
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Volume:
23
Language:
english
Pages:
5
DOI:
10.1007/s10854-012-0786-6
Date:
July, 2012
File:
PDF, 373 KB
english, 2012
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