Dissociative Excitation of C2H2in the Electron Cyclotron...

Plasma Chemistry and Plasma Processing 2012 / 04 Vol. 32; Iss. 2

Dissociative Excitation of C2H2in the Electron Cyclotron Resonance Plasma of Ar: Production of CH(A2Δ) Radicals and Formation of Hydrogenated Amorphous Carbon Films

Haruhiko Ito, Katsuaki Koshimura, Saori Onitsuka, Kohtaro Okada, Tsuneo Suzuki, Hiroki Akasaka, Hidetoshi Saitoh
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Volume:
32
Language:
english
Pages:
18
DOI:
10.1007/s11090-012-9355-2
Date:
April, 2012
File:
PDF, 730 KB
english, 2012
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