Characterization of titanium thin films prepared by bias assisted magnetron sputtering
H. S. Vijaya, G. Mohan Rao, S. Mohan, G. K. Muralidhar, G. N. SubbannaVolume:
27
Language:
english
Pages:
4
DOI:
10.1007/s11663-996-0020-0
Date:
December, 1996
File:
PDF, 537 KB
english, 1996