Influence of Substrate Temperature on Structural and...

Journal of Electronic Materials 2012 / 04 Vol. 41; Iss. 4

Influence of Substrate Temperature on Structural and Thermoelectric Properties of Antimony Telluride Thin Films Fabricated by RF and DC Cosputtering

Tianbao Chen, Ping Fan, Zhuanghao Zheng, Dongping Zhang, Xingmin Cai, Guangxing Liang, Zhaokun Cai
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Volume:
41
Language:
english
Pages:
5
DOI:
10.1007/s11664-011-1896-2
Date:
April, 2012
File:
PDF, 261 KB
english, 2012
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