Electron-Beam Sensitivity and Patterning of an...

Journal of Electronic Materials 2012 / 07 Vol. 41; Iss. 7

Electron-Beam Sensitivity and Patterning of an Aqueous-Develop, Epoxy-Based Polynorbornene Dielectric Material

Mehrsa Raeis-Zadeh, Paul A. Kohl
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Volume:
41
Language:
english
Pages:
8
DOI:
10.1007/s11664-012-1961-5
Date:
July, 2012
File:
PDF, 387 KB
english, 2012
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